ASML Metrology Architect in Veldhoven, Netherlands


Do you have a proven track record in leadership? A MSc, PDEng or PhD in Mathematics, Physics, or Computer Science? And at least five years of development experience in a technical product development? If all this sounds like you, then the Metrology Architect position might be for you!

Job Mission

As a part of ASML’s Imaging Metrology team, you will develop and realize functional solutions that are instrumental to have our lithographic machines operating very productive while maintaining nanometer accuracy. As an architect, your mission is to set direction to the team and manage your stakeholders to obtain the required results within the constraints of the project. You also create and propagate the function roadmap, to support the ASML product roadmap.

Job Description

ASML’s lithography systems deliver nanometer accuracy at high productivity. The required accuracy level cannot be achieved by hardware and mechatronics solutions only. At system level, imperfections of the subsystems need to be measured and corrected. The Metrology Functional Group creates mathematical models describing the lithography machine and its imperfections. The parameters of these models are calibrated using several sensors present in the machine. The calibrations of the machine can be done offline in a dedicated calibration test, or inline while running production. Afterwards, the calibrated parameters are used to control the machine in such a manner that the inaccuracies are corrected.

Metrology solutions incorporate systems design concerns that cover the spectrum from development, realization, integration, manufacturing, installation, to field and factory support.

To advance our metrology competence is another aspect of the work. This way we stay on top of what’s required to assure the timely delivery of state of the art solutions for ASML’s product roadmap.


MSc, PDEng or PhD in Mathematics, Physics, or Computer Science


At least five years of development experience in a technical product development context is required.

Experience with mathematical modeling and MatLab, and experience in a technical product development are a pre. Understanding and experience with software development teams, but also with system engineering is also a pre.

Personal skills

We expect you to be an excellent communicator, team player, self-starter, to take initiative and to be result oriented.

As an architect we expect you to show leadership, and influence your stakeholders to deploy functional architecture changes and development methods.

You are the conscience of the group and should set the example.

Context of the position

This position is within the Imaging Metrology Department, which is responsible for the measure wafer and expose sequence of ASML’s wafer scanners. This includes for all the measurements, models and calibrations which are required for optimal image positioning and image quality. Imaging Metrology is part of the D&E; department within the EUV business line, which, in turn, is responsible for the specification, design, implementation, and integration and testing of the ASML products.

Other Information

Keywords: Architecture, Mathematics, Physics, Electronics, Metrology, Sensors, Modeling, Calibrating, MATLAB, configuration management, architect, computer science, electrical engineering, lithography.

Location: Veldhoven, Netherlands

Level: PhD

Experience: 2-5 Professional

Available since: 2017-07-17

Background: System Integration, Mechanics, Others - Technical, Physics, Optics, Mechatronics

Reference: RC06435