ASML Etch Process Engineer in Veldhoven, Netherlands


Are you challenged by demanding projects in a multidisciplinary context? Do you have the capabilities and the drive to provide effective solutions to complex technical problems under challenging time constraints? Are you able to identify the gap between imaging performance of our scanners and what is needed for patterning solutions of our customers in the tech process?Please contact us today. We currently have an exciting opportunity for an Process Integration Engineer in the Imaging Performance Applications department.

Job Mission

As an Etch Unit Process Engineer within Imaging you will be a key player in making the performance of our imaging and patterning application products meet our customer’s demands. You will enable product definition, assessment and optimization in close interaction with our scanners, metrology and optimizer products.

Job Description

Our customers make semiconductor devices. To do so successfully our customers need to produce the intended device structure on the wafer within acceptable variation over the complete manufacturing process. This requires keeping the contribution of all manufacturing tools as for example scanner, etcher but also measurement metrology within acceptable limits by means of optimization products.

You will support our development of optimization products including computational lithography and metrology from feasibility to final roll out to the customer. You will need to understand why and how patterning performance is important to our customers. You will use this knowledge to provide guidance on future product choices including predicting performance by means of sophisticated simulation tools and providing test description and analysis methods to assess the performance. You will be part of a group of people adjacent competencies, working together to lift their know-how to new levels year-after-year, making sure to be prepared for challenges ahead. You will contribute to roadmaps and competence management plans. You will also be part of a project team, working to meet a shared goal against challenging constraints. Making test plans, carrying out analyses, reporting results and conclusions. Interface with other projects, manufacturing, marketing, customer support and the customer!

Working at ASML as an Etch Unit Process Engineer within Imaging is about being part of a dynamic, fast-paced community, facing unprecedented challenges at the forefront of technology together. You will find an open environment, offering myriad possibilities to take charge of your career, to be inspired, to have fun.


Solid technical background (BSc/MSc/PhD in physics, material science, nano technology or related).


  • Experience (> 5-10 years) in the semiconductor industry. Direct experience in a process development for 300mm high volume production environment a plus

  • In depth experience, in BEOL, MEOL and/or FEOL etch process development in multiple technology nodes, preferably down to 2x/1x nm node, ALE knowledge is a plus

  • Understanding cause and resolution of etch performance variances over the wafer due to:

  • Setup, calibration and stability of etch tool

  • Device structure and patterning method

  • Reaction of etch due to present variances on the wafer

  • Created, maintained and verified etch tool contributions via an error partition budget for the layer production process

  • Understanding of design rules for chip making and their implications for the etch process

  • Patterning modeling experience is a plus (e.g. Coventor)

  • Demonstrated ability to work well within global matrixed team or environment

Personal skills
  • Strong pragmatic attitude with an analytical view.

  • Self-propelling with a lot of initiative and drive. Able to initiate, influence, stir.

  • Out-of-the-box thinker.

  • Team player, responsible and reliable.

  • Able to distinguish main matters from side issues. Able to develop a vision.

  • Excellent communicator. Knows how to convey complex topics in an understandable fashion.

  • Convincing. Able to convey a vision.

  • Flexible and committed.

Context of the position
Other information

Contact information If you have any questions about this position or this department, please contact Edgar Dekker (Recruiter) via +31 (0)6-30 98 88 11. If you wish to apply, please upload your resume and cover letter via the link “Apply for this job” below this job description.

Location: Veldhoven, Netherlands

Level: Master

Experience: 5-10 Experienced

Available since: 2/23/2018

Functional area: Research & Development

Background: Physics

Reference: req690