ASML Sr. design engineer EUV mirror heating in Veldhoven, Netherlands


The D&E; Optical Column department is part of the EUV sector of ASML. Its task is to develop and industrialize the imaging function for the Extreme Ultraviolet (EUV) lithography machines.

Job Mission

The candidate is responsible for integrated ASML POB design studies with special focus on optimization of mirror heating control function in NXE:3500.

Job Description
  • Develops the best solutions for our customers for best imaging which is crucial for customer yield.

  • This is done by simulating and optimizing the mirror heating control design for optimal optical performance of the NXE:3500. Thereby using Matlab and FEM tooling in close collaboration with Zeiss engineers.

  • Aligns on requirements and inputs from system engineering, POB architects, imaging application, POB mechatronics, metrology, and Zeiss system engineering.

  • Analyses thermal data of current NXE:3400 systems and keeps an close eye on developments in customer system usage (w.r.t. reticle reflectivity, system load, power), and derives for the right strategy for NXE:3500 using this knowledge.

  • Governs the implementation of the mirror heating control architecture including making the right choices for the MH supporting functions, such as the high power lasers, the implementation in SW, all in line with the thermal architecture.



  • JG9, >10y experience as lead engineer in product development

  • demonstrated affinity to perform both detailed engineering and making comprehensive system overviews

  • a background in thermal architecture, optics, and/or mechatronic system development is a pre

  • strong Matlab skills, experience with FEM ( for example ANSYS)

Personal skills

Strong analytical and communication skills and ability to interact with different intercultural teams

Context of the position

The holder of the position reports to the group lead of the Projection group and is operational within multidisciplinary projects. The Projection group is responsible for optimizing the imaging performance by providing the means and methods to improve projection optics.


Location: Veldhoven, Netherlands

Level: Master

Experience: 5-10 Experienced

Available since: 4/12/2018

Functional area: EUV, Design Engineering

Background: Physics, Optics

Reference: req2087